{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"20.83": {"P": 0}, "24.76": {"P": 0.0002228}, "29.44": {"P": 0.0008722}, "35.0": {"P": 0.002177}, "41.61": {"P": 0.004479}, "49.47": {"P": 0.00818}, "58.81": {"P": 0.01364}, "69.92": {"P": 0.02097}, "83.12": {"P": 0.02986}, "98.82": {"P": 0.03952}, "117.5": {"P": 0.04893}, "139.7": {"P": 0.05721}, "166.0": {"P": 0.06388}, "197.4": {"P": 0.06882}, "234.7": {"P": 0.07219}, "279.0": {"P": 0.07422}, "331.7": {"P": 0.07515}, "394.3": {"P": 0.07518}, "468.8": {"P": 0.07446}, "557.3": {"P": 0.07312}, "662.6": {"P": 0.07125}, "787.7": {"P": 0.06893}, "936.5": {"P": 0.06624}, "1113.0": {"P": 0.06325}, "1324.0": {"P": 0.06001}, "1574.0": {"P": 0.05659}, "1871.0": {"P": 0.05305}, "2224.0": {"P": 0.04946}, "2644.0": {"P": 0.04586}, "3144.0": {"P": 0.0423}, "3737.0": {"P": 0.03884}, "4443.0": {"P": 0.03549}, "5282.0": {"P": 0.03229}, "6280.0": {"P": 0.02925}, "7466.0": {"P": 0.02641}, "8875.0": {"P": 0.02375}, "10550.0": {"P": 0.02129}, "12540.0": {"P": 0.01903}, "14910.0": {"P": 0.01695}, "17730.0": {"P": 0.01507}, "21080.0": {"P": 0.01336}, "25060.0": {"P": 0.01181}, "29790.0": {"P": 0.01043}, "35420.0": {"P": 0.009182}, "42110.0": {"P": 0.008071}, "50060.0": {"P": 0.007083}, "59510.0": {"P": 0.006205}, "70750.0": {"P": 0.005428}, "84110.0": {"P": 0.004741}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 1.237, "q": 0.2013, "mu": 1.539, "epsilonL": 0.001197, "Eth": 20.83}, "E_min": 20.83, "E_max": 100000}}]}