{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on B(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.237, "q": 0.2013, "mu": 1.539, "epsilonL": 0.001197, "Eth": 20.83}, "E_min": 20.83, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
20.83	0.0	
24.76	0.0002228	
29.44	0.0008722	
35.0	0.002177	
41.61	0.004479	
49.47	0.00818	
58.81	0.01364	
69.92	0.02097	
83.12	0.02986	
98.82	0.03952	
117.5	0.04893	
139.7	0.05721	
166.0	0.06388	
197.4	0.06882	
234.7	0.07219	
279.0	0.07422	
331.7	0.07515	
394.3	0.07518	
468.8	0.07446	
557.3	0.07312	
662.6	0.07125	
787.7	0.06893	
936.5	0.06624	
1113.0	0.06325	
1324.0	0.06001	
1574.0	0.05659	
1871.0	0.05305	
2224.0	0.04946	
2644.0	0.04586	
3144.0	0.0423	
3737.0	0.03884	
4443.0	0.03549	
5282.0	0.03229	
6280.0	0.02925	
7466.0	0.02641	
8875.0	0.02375	
10550.0	0.02129	
12540.0	0.01903	
14910.0	0.01695	
17730.0	0.01507	
21080.0	0.01336	
25060.0	0.01181	
29790.0	0.01043	
35420.0	0.009182	
42110.0	0.008071	
50060.0	0.007083	
59510.0	0.006205	
70750.0	0.005428	
84110.0	0.004741	
-----