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Plasma-Surface Interaction Data Set 174

Sputtering of D+ on B(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on B(pc) at 300 K

angle = 0.0 deg E /eV P
20.261.892e-25
24.090.0002543
28.660.0008833
34.090.002007
40.550.00376
48.240.006202
57.380.009241
68.260.0126
81.20.01591
96.590.01881
114.90.02109
136.70.0227
162.60.02369
193.40.02415
230.00.02419
273.60.0239
325.50.02335
387.20.02259
460.60.02167
547.90.02064
651.70.01952
775.30.01834
922.20.01713
1097.00.0159
1305.00.01469
1552.00.0135
1846.00.01235
2196.00.01124
2613.00.01019
3108.00.009204
3697.00.008282
4398.00.007427
5231.00.006639
6223.00.005917
7402.00.005259
8805.00.004662
10470.00.004124
12460.00.003639
14820.00.003205
17630.00.002817
20970.00.002472
24950.00.002165
29670.00.001894
35300.00.001654
41990.00.001442
49950.00.001256
59410.00.001093
70670.00.0009496
84070.00.0008243

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 20.25 – 100000