{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"20.26": {"P": 1.892e-25}, "24.09": {"P": 0.0002543}, "28.66": {"P": 0.0008833}, "34.09": {"P": 0.002007}, "40.55": {"P": 0.00376}, "48.24": {"P": 0.006202}, "57.38": {"P": 0.009241}, "68.26": {"P": 0.0126}, "81.2": {"P": 0.01591}, "96.59": {"P": 0.01881}, "114.9": {"P": 0.02109}, "136.7": {"P": 0.0227}, "162.6": {"P": 0.02369}, "193.4": {"P": 0.02415}, "230.0": {"P": 0.02419}, "273.6": {"P": 0.0239}, "325.5": {"P": 0.02335}, "387.2": {"P": 0.02259}, "460.6": {"P": 0.02167}, "547.9": {"P": 0.02064}, "651.7": {"P": 0.01952}, "775.3": {"P": 0.01834}, "922.2": {"P": 0.01713}, "1097.0": {"P": 0.0159}, "1305.0": {"P": 0.01469}, "1552.0": {"P": 0.0135}, "1846.0": {"P": 0.01235}, "2196.0": {"P": 0.01124}, "2613.0": {"P": 0.01019}, "3108.0": {"P": 0.009204}, "3697.0": {"P": 0.008282}, "4398.0": {"P": 0.007427}, "5231.0": {"P": 0.006639}, "6223.0": {"P": 0.005917}, "7402.0": {"P": 0.005259}, "8805.0": {"P": 0.004662}, "10470.0": {"P": 0.004124}, "12460.0": {"P": 0.003639}, "14820.0": {"P": 0.003205}, "17630.0": {"P": 0.002817}, "20970.0": {"P": 0.002472}, "24950.0": {"P": 0.002165}, "29670.0": {"P": 0.001894}, "35300.0": {"P": 0.001654}, "41990.0": {"P": 0.001442}, "49950.0": {"P": 0.001256}, "59410.0": {"P": 0.001093}, "70670.0": {"P": 0.0009496}, "84070.0": {"P": 0.0008243}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 1.007, "q": 0.0686, "mu": 1.411, "epsilonL": 0.00277, "Eth": 20.25}, "E_min": 20.25, "E_max": 100000}}]}