{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on B(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.007, "q": 0.0686, "mu": 1.411, "epsilonL": 0.00277, "Eth": 20.25}, "E_min": 20.25, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
20.26	1.892e-25	
24.09	0.0002543	
28.66	0.0008833	
34.09	0.002007	
40.55	0.00376	
48.24	0.006202	
57.38	0.009241	
68.26	0.0126	
81.2	0.01591	
96.59	0.01881	
114.9	0.02109	
136.7	0.0227	
162.6	0.02369	
193.4	0.02415	
230.0	0.02419	
273.6	0.0239	
325.5	0.02335	
387.2	0.02259	
460.6	0.02167	
547.9	0.02064	
651.7	0.01952	
775.3	0.01834	
922.2	0.01713	
1097.0	0.0159	
1305.0	0.01469	
1552.0	0.0135	
1846.0	0.01235	
2196.0	0.01124	
2613.0	0.01019	
3108.0	0.009204	
3697.0	0.008282	
4398.0	0.007427	
5231.0	0.006639	
6223.0	0.005917	
7402.0	0.005259	
8805.0	0.004662	
10470.0	0.004124	
12460.0	0.003639	
14820.0	0.003205	
17630.0	0.002817	
20970.0	0.002472	
24950.0	0.002165	
29670.0	0.001894	
35300.0	0.001654	
41990.0	0.001442	
49950.0	0.001256	
59410.0	0.001093	
70670.0	0.0009496	
84070.0	0.0008243	
-----