pwiDB

Plasma-Surface Interaction Data Set 532

Sputtering of U⁺ on U(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of U⁺ on U(pc) at 300 K

angle = 0.0 deg	E /eV	P
	26.8	1.567e-35
	31.69	5.309e-05
	37.49	0.0003088
	44.34	0.001001
	52.44	0.002556
	62.02	0.005722
	73.36	0.01176
	86.77	0.02267
	102.6	0.04146
	121.4	0.07217
	143.6	0.1195
	169.8	0.1877
	200.8	0.279
	237.5	0.3924
	280.9	0.5241
	332.3	0.6687
	393.0	0.8218
	464.8	0.9809
	549.8	1.146
	650.3	1.317
	769.1	1.496
	909.7	1.686
	1076.0	1.888
	1273.0	2.105
	1505.0	2.339
	1780.0	2.591
	2106.0	2.863
	2490.0	3.156
	2946.0	3.473
	3484.0	3.813
	4121.0	4.179
	4874.0	4.571
	5764.0	4.99
	6818.0	5.437
	8064.0	5.912
	9538.0	6.416
	11280.0	6.947
	13340.0	7.507
	15780.0	8.093
	18670.0	8.706
	22080.0	9.344
	26110.0	10.0
	30880.0	10.69
	36530.0	11.38
	43200.0	12.1
	51100.0	12.83
	60440.0	13.56
	71480.0	14.3
	84550.0	15.04

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1932
q = 56.28
mu = 2.042
epsilonL = 3.011e-07
Eth = 26.8

Fit range

E = 26.8 – 100000