{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "U", "surface_phase": "pc", "species": {"text": "U+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of U+ on U(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1932, "q": 56.28, "mu": 2.042, "epsilonL": 3.011e-07, "Eth": 26.8}, "E_min": 26.8, "E_max": 100000} angle = 0.0 deg E /eV P 26.8 1.567e-35 31.69 5.309e-05 37.49 0.0003088 44.34 0.001001 52.44 0.002556 62.02 0.005722 73.36 0.01176 86.77 0.02267 102.6 0.04146 121.4 0.07217 143.6 0.1195 169.8 0.1877 200.8 0.279 237.5 0.3924 280.9 0.5241 332.3 0.6687 393.0 0.8218 464.8 0.9809 549.8 1.146 650.3 1.317 769.1 1.496 909.7 1.686 1076.0 1.888 1273.0 2.105 1505.0 2.339 1780.0 2.591 2106.0 2.863 2490.0 3.156 2946.0 3.473 3484.0 3.813 4121.0 4.179 4874.0 4.571 5764.0 4.99 6818.0 5.437 8064.0 5.912 9538.0 6.416 11280.0 6.947 13340.0 7.507 15780.0 8.093 18670.0 8.706 22080.0 9.344 26110.0 10.0 30880.0 10.69 36530.0 11.38 43200.0 12.1 51100.0 12.83 60440.0 13.56 71480.0 14.3 84550.0 15.04 -----