pwiDB

Plasma-Surface Interaction Data Set 530

Sputtering of Xe⁺ on U(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on U(pc) at 300 K

angle = 0.0 deg	E /eV	P
	25.96	0.0
	30.72	0.0001244
	36.36	0.0008224
	43.03	0.002877
	50.93	0.007715
	60.28	0.01771
	71.34	0.03633
	84.44	0.06767
	99.93	0.115
	118.3	0.179
	140.0	0.2565
	165.7	0.3423
	196.1	0.4319
	232.1	0.5225
	274.6	0.6139
	325.1	0.7069
	384.7	0.8029
	455.3	0.9036
	538.9	1.01
	637.8	1.124
	754.8	1.247
	893.3	1.379
	1057.0	1.521
	1251.0	1.674
	1481.0	1.839
	1753.0	2.016
	2074.0	2.205
	2455.0	2.408
	2906.0	2.624
	3439.0	2.854
	4070.0	3.097
	4817.0	3.354
	5701.0	3.624
	6748.0	3.908
	7986.0	4.204
	9452.0	4.511
	11190.0	4.83
	13240.0	5.159
	15670.0	5.496
	18540.0	5.841
	21950.0	6.191
	25980.0	6.545
	30740.0	6.9
	36390.0	7.255
	43060.0	7.607
	50970.0	7.954
	60320.0	8.292
	71390.0	8.619
	84490.0	8.932

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0694
q = 26.96
mu = 2.208
epsilonL = 7.169e-07
Eth = 25.96

Fit range

E = 25.96 – 100000