pwiDB

Plasma-Surface Interaction Data Set 529

Sputtering of Kr⁺ on U(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on U(pc) at 300 K

angle = 0.0 deg	E /eV	P
	22.53	8.606e-36
	26.74	0.0001939
	31.74	0.001179
	37.67	0.00391
	44.72	0.01004
	53.08	0.02211
	63.0	0.04346
	74.78	0.07741
	88.76	0.1257
	105.4	0.1872
	125.0	0.2583
	148.4	0.3343
	176.2	0.4123
	209.1	0.4908
	248.2	0.5701
	294.6	0.6511
	349.7	0.735
	415.1	0.8231
	492.7	0.9164
	584.8	1.016
	694.1	1.122
	823.8	1.236
	977.9	1.358
	1161.0	1.489
	1378.0	1.629
	1635.0	1.778
	1941.0	1.936
	2304.0	2.103
	2735.0	2.28
	3246.0	2.467
	3853.0	2.662
	4573.0	2.866
	5428.0	3.078
	6442.0	3.297
	7647.0	3.523
	9077.0	3.755
	10770.0	3.991
	12790.0	4.231
	15180.0	4.473
	18020.0	4.716
	21380.0	4.958
	25380.0	5.197
	30130.0	5.431
	35760.0	5.659
	42450.0	5.878
	50380.0	6.087
	59800.0	6.282
	70980.0	6.462
	84250.0	6.623

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0592
q = 18.09
mu = 2.096
epsilonL = 1.299e-06
Eth = 22.53

Fit range

E = 22.53 – 100000