{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "U", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on U(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0592, "q": 18.09, "mu": 2.096, "epsilonL": 1.299e-06, "Eth": 22.53}, "E_min": 22.53, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
22.53	8.606e-36	
26.74	0.0001939	
31.74	0.001179	
37.67	0.00391	
44.72	0.01004	
53.08	0.02211	
63.0	0.04346	
74.78	0.07741	
88.76	0.1257	
105.4	0.1872	
125.0	0.2583	
148.4	0.3343	
176.2	0.4123	
209.1	0.4908	
248.2	0.5701	
294.6	0.6511	
349.7	0.735	
415.1	0.8231	
492.7	0.9164	
584.8	1.016	
694.1	1.122	
823.8	1.236	
977.9	1.358	
1161.0	1.489	
1378.0	1.629	
1635.0	1.778	
1941.0	1.936	
2304.0	2.103	
2735.0	2.28	
3246.0	2.467	
3853.0	2.662	
4573.0	2.866	
5428.0	3.078	
6442.0	3.297	
7647.0	3.523	
9077.0	3.755	
10770.0	3.991	
12790.0	4.231	
15180.0	4.473	
18020.0	4.716	
21380.0	4.958	
25380.0	5.197	
30130.0	5.431	
35760.0	5.659	
42450.0	5.878	
50380.0	6.087	
59800.0	6.282	
70980.0	6.462	
84250.0	6.623	
-----