pwiDB

Plasma-Surface Interaction Data Set 528

Sputtering of Ar⁺ on U(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on U(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.6	0.0
	25.66	0.0001878
	30.49	0.001174
	36.22	0.003951
	43.02	0.01019
	51.11	0.02231
	60.72	0.04302
	72.13	0.07412
	85.69	0.1151
	101.8	0.1631
	120.9	0.2142
	143.7	0.2657
	170.7	0.3163
	202.7	0.3662
	240.9	0.416
	286.1	0.4668
	339.9	0.5192
	403.8	0.5741
	479.7	0.6317
	569.9	0.6927
	677.0	0.7571
	804.3	0.8253
	955.5	0.8973
	1135.0	0.9732
	1348.0	1.053
	1602.0	1.136
	1903.0	1.223
	2261.0	1.314
	2686.0	1.407
	3191.0	1.504
	3790.0	1.602
	4503.0	1.703
	5349.0	1.804
	6355.0	1.907
	7549.0	2.01
	8968.0	2.112
	10650.0	2.213
	12660.0	2.311
	15040.0	2.407
	17860.0	2.499
	21220.0	2.586
	25210.0	2.667
	29950.0	2.741
	35580.0	2.807
	42260.0	2.864
	50210.0	2.911
	59650.0	2.947
	70860.0	2.97
	84180.0	2.98

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0584
q = 7.622
mu = 2.131
epsilonL = 3.223e-06
Eth = 21.6

Fit range

E = 21.6 – 100000