{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "U", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ar+ on U(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0584, "q": 7.622, "mu": 2.131, "epsilonL": 3.223e-06, "Eth": 21.6}, "E_min": 21.6, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.6	0.0	
25.66	0.0001878	
30.49	0.001174	
36.22	0.003951	
43.02	0.01019	
51.11	0.02231	
60.72	0.04302	
72.13	0.07412	
85.69	0.1151	
101.8	0.1631	
120.9	0.2142	
143.7	0.2657	
170.7	0.3163	
202.7	0.3662	
240.9	0.416	
286.1	0.4668	
339.9	0.5192	
403.8	0.5741	
479.7	0.6317	
569.9	0.6927	
677.0	0.7571	
804.3	0.8253	
955.5	0.8973	
1135.0	0.9732	
1348.0	1.053	
1602.0	1.136	
1903.0	1.223	
2261.0	1.314	
2686.0	1.407	
3191.0	1.504	
3790.0	1.602	
4503.0	1.703	
5349.0	1.804	
6355.0	1.907	
7549.0	2.01	
8968.0	2.112	
10650.0	2.213	
12660.0	2.311	
15040.0	2.407	
17860.0	2.499	
21220.0	2.586	
25210.0	2.667	
29950.0	2.741	
35580.0	2.807	
42260.0	2.864	
50210.0	2.911	
59650.0	2.947	
70860.0	2.97	
84180.0	2.98	
-----