pwiDB

Plasma-Surface Interaction Data Set 527

Sputtering of Ne⁺ on U(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on U(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.51	0.0
	33.68	0.0003597
	39.78	0.001817
	46.99	0.005266
	55.51	0.01196
	65.58	0.02327
	77.46	0.04021
	91.5	0.06278
	108.1	0.08979
	127.7	0.1193
	150.8	0.1496
	178.2	0.1796
	210.5	0.2088
	248.6	0.2375
	293.7	0.2659
	346.9	0.2943
	409.8	0.3232
	484.1	0.3528
	571.8	0.3832
	675.5	0.4148
	797.9	0.4473
	942.5	0.4811
	1113.0	0.5159
	1315.0	0.5517
	1554.0	0.5885
	1835.0	0.6261
	2168.0	0.6644
	2561.0	0.7032
	3025.0	0.7423
	3573.0	0.7815
	4221.0	0.8205
	4986.0	0.8591
	5890.0	0.8971
	6957.0	0.934
	8219.0	0.9696
	9708.0	1.004
	11470.0	1.036
	13550.0	1.065
	16000.0	1.092
	18900.0	1.116
	22330.0	1.136
	26380.0	1.152
	31160.0	1.164
	36810.0	1.172
	43480.0	1.174
	51360.0	1.172
	60670.0	1.164
	71660.0	1.15
	84660.0	1.131

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0449
q = 3.003
mu = 1.884
epsilonL = 6.517e-06
Eth = 28.51

Fit range

E = 28.51 – 100000