{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "U", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on U(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0449, "q": 3.003, "mu": 1.884, "epsilonL": 6.517e-06, "Eth": 28.51}, "E_min": 28.51, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.51	0.0	
33.68	0.0003597	
39.78	0.001817	
46.99	0.005266	
55.51	0.01196	
65.58	0.02327	
77.46	0.04021	
91.5	0.06278	
108.1	0.08979	
127.7	0.1193	
150.8	0.1496	
178.2	0.1796	
210.5	0.2088	
248.6	0.2375	
293.7	0.2659	
346.9	0.2943	
409.8	0.3232	
484.1	0.3528	
571.8	0.3832	
675.5	0.4148	
797.9	0.4473	
942.5	0.4811	
1113.0	0.5159	
1315.0	0.5517	
1554.0	0.5885	
1835.0	0.6261	
2168.0	0.6644	
2561.0	0.7032	
3025.0	0.7423	
3573.0	0.7815	
4221.0	0.8205	
4986.0	0.8591	
5890.0	0.8971	
6957.0	0.934	
8219.0	0.9696	
9708.0	1.004	
11470.0	1.036	
13550.0	1.065	
16000.0	1.092	
18900.0	1.116	
22330.0	1.136	
26380.0	1.152	
31160.0	1.164	
36810.0	1.172	
43480.0	1.174	
51360.0	1.172	
60670.0	1.164	
71660.0	1.15	
84660.0	1.131	
-----