pwiDB

Plasma-Surface Interaction Data Set 523

Sputtering of Xe⁺ on Th(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Th(pc) at 300 K

angle = 0.0 deg	E /eV	P
	26.48	0.0
	31.32	0.0001079
	37.06	0.0006058
	43.84	0.001915
	51.86	0.004776
	61.36	0.01041
	72.59	0.02071
	85.88	0.03829
	101.6	0.06627
	120.2	0.1076
	142.2	0.1637
	168.2	0.2341
	199.0	0.3158
	235.5	0.4051
	278.5	0.4988
	329.5	0.5951
	389.9	0.6936
	461.2	0.7949
	545.6	0.8999
	645.5	1.01
	763.7	1.126
	903.5	1.25
	1069.0	1.382
	1265.0	1.523
	1496.0	1.674
	1770.0	1.836
	2094.0	2.009
	2477.0	2.193
	2930.0	2.389
	3467.0	2.598
	4102.0	2.818
	4852.0	3.051
	5741.0	3.295
	6791.0	3.551
	8034.0	3.818
	9505.0	4.096
	11250.0	4.383
	13300.0	4.679
	15740.0	4.983
	18620.0	5.293
	22030.0	5.608
	26060.0	5.926
	30830.0	6.245
	36470.0	6.563
	43150.0	6.878
	51050.0	7.188
	60390.0	7.491
	71450.0	7.783
	84530.0	8.062

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1059
q = 24.25
mu = 1.998
epsilonL = 7.293e-07
Eth = 26.48

Fit range

E = 26.48 – 100000