{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Th", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Th(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1059, "q": 24.25, "mu": 1.998, "epsilonL": 7.293e-07, "Eth": 26.48}, "E_min": 26.48, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
26.48	0.0	
31.32	0.0001079	
37.06	0.0006058	
43.84	0.001915	
51.86	0.004776	
61.36	0.01041	
72.59	0.02071	
85.88	0.03829	
101.6	0.06627	
120.2	0.1076	
142.2	0.1637	
168.2	0.2341	
199.0	0.3158	
235.5	0.4051	
278.5	0.4988	
329.5	0.5951	
389.9	0.6936	
461.2	0.7949	
545.6	0.8999	
645.5	1.01	
763.7	1.126	
903.5	1.25	
1069.0	1.382	
1265.0	1.523	
1496.0	1.674	
1770.0	1.836	
2094.0	2.009	
2477.0	2.193	
2930.0	2.389	
3467.0	2.598	
4102.0	2.818	
4852.0	3.051	
5741.0	3.295	
6791.0	3.551	
8034.0	3.818	
9505.0	4.096	
11250.0	4.383	
13300.0	4.679	
15740.0	4.983	
18620.0	5.293	
22030.0	5.608	
26060.0	5.926	
30830.0	6.245	
36470.0	6.563	
43150.0	6.878	
51050.0	7.188	
60390.0	7.491	
71450.0	7.783	
84530.0	8.062	
-----