pwiDB

Plasma-Surface Interaction Data Set 522

Sputtering of Kr⁺ on Th(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Th(pc) at 300 K

angle = 0.0 deg	E /eV	P
	22.9	0.0
	27.18	0.0002022
	32.25	0.001041
	38.26	0.003114
	45.4	0.00742
	53.87	0.0155
	63.92	0.02952
	75.84	0.05205
	89.99	0.08555
	106.8	0.1315
	126.7	0.1894
	150.3	0.2573
	178.4	0.3319
	211.7	0.4106
	251.2	0.4916
	298.0	0.5744
	353.6	0.6593
	419.6	0.747
	497.8	0.8385
	590.7	0.9346
	700.9	1.036
	831.7	1.144
	986.8	1.259
	1171.0	1.381
	1389.0	1.512
	1649.0	1.65
	1956.0	1.796
	2321.0	1.951
	2754.0	2.115
	3268.0	2.287
	3877.0	2.467
	4601.0	2.654
	5459.0	2.849
	6477.0	3.051
	7686.0	3.259
	9120.0	3.471
	10820.0	3.688
	12840.0	3.908
	15230.0	4.129
	18080.0	4.351
	21450.0	4.572
	25450.0	4.79
	30200.0	5.004
	35830.0	5.212
	42520.0	5.411
	50450.0	5.6
	59860.0	5.777
	71030.0	5.939
	84280.0	6.085

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0767
q = 16.58
mu = 1.883
epsilonL = 1.325e-06
Eth = 22.9

Fit range

E = 22.9 – 100000