{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Th", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of Kr+ on Th(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0767, "q": 16.58, "mu": 1.883, "epsilonL": 1.325e-06, "Eth": 22.9}, "E_min": 22.9, "E_max": 100000} angle = 0.0 deg E /eV P 22.9 0.0 27.18 0.0002022 32.25 0.001041 38.26 0.003114 45.4 0.00742 53.87 0.0155 63.92 0.02952 75.84 0.05205 89.99 0.08555 106.8 0.1315 126.7 0.1894 150.3 0.2573 178.4 0.3319 211.7 0.4106 251.2 0.4916 298.0 0.5744 353.6 0.6593 419.6 0.747 497.8 0.8385 590.7 0.9346 700.9 1.036 831.7 1.144 986.8 1.259 1171.0 1.381 1389.0 1.512 1649.0 1.65 1956.0 1.796 2321.0 1.951 2754.0 2.115 3268.0 2.287 3877.0 2.467 4601.0 2.654 5459.0 2.849 6477.0 3.051 7686.0 3.259 9120.0 3.471 10820.0 3.688 12840.0 3.908 15230.0 4.129 18080.0 4.351 21450.0 4.572 25450.0 4.79 30200.0 5.004 35830.0 5.212 42520.0 5.411 50450.0 5.6 59860.0 5.777 71030.0 5.939 84280.0 6.085 -----