pwiDB

Plasma-Surface Interaction Data Set 521

Sputtering of Ar⁺ on Th(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Th(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.77	4.627e-28
	28.18	0.0005163
	33.41	0.002124
	39.62	0.005468
	46.97	0.01153
	55.69	0.02161
	66.03	0.03717
	78.29	0.05957
	92.82	0.08962
	110.1	0.1273
	130.5	0.1715
	154.7	0.2208
	183.4	0.2735
	217.5	0.3282
	257.9	0.3842
	305.8	0.4413
	362.5	0.4996
	429.8	0.5594
	509.6	0.6211
	604.2	0.6851
	716.4	0.7517
	849.4	0.8212
	1007.0	0.8938
	1194.0	0.9695
	1416.0	1.049
	1679.0	1.131
	1990.0	1.216
	2360.0	1.304
	2798.0	1.395
	3317.0	1.488
	3933.0	1.584
	4664.0	1.68
	5530.0	1.778
	6556.0	1.877
	7773.0	1.975
	9217.0	2.072
	10930.0	2.168
	12960.0	2.262
	15360.0	2.352
	18210.0	2.439
	21600.0	2.521
	25600.0	2.597
	30360.0	2.666
	36000.0	2.728
	42680.0	2.781
	50600.0	2.824
	60000.0	2.856
	71130.0	2.876
	84340.0	2.884

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0543
q = 7.374
mu = 1.607
epsilonL = 3.3e-06
Eth = 23.77

Fit range

E = 23.77 – 100000