{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Th", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Th(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0543, "q": 7.374, "mu": 1.607, "epsilonL": 3.3e-06, "Eth": 23.77}, "E_min": 23.77, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.77	4.627e-28	
28.18	0.0005163	
33.41	0.002124	
39.62	0.005468	
46.97	0.01153	
55.69	0.02161	
66.03	0.03717	
78.29	0.05957	
92.82	0.08962	
110.1	0.1273	
130.5	0.1715	
154.7	0.2208	
183.4	0.2735	
217.5	0.3282	
257.9	0.3842	
305.8	0.4413	
362.5	0.4996	
429.8	0.5594	
509.6	0.6211	
604.2	0.6851	
716.4	0.7517	
849.4	0.8212	
1007.0	0.8938	
1194.0	0.9695	
1416.0	1.049	
1679.0	1.131	
1990.0	1.216	
2360.0	1.304	
2798.0	1.395	
3317.0	1.488	
3933.0	1.584	
4664.0	1.68	
5530.0	1.778	
6556.0	1.877	
7773.0	1.975	
9217.0	2.072	
10930.0	2.168	
12960.0	2.262	
15360.0	2.352	
18210.0	2.439	
21600.0	2.521	
25600.0	2.597	
30360.0	2.666	
36000.0	2.728	
42680.0	2.781	
50600.0	2.824	
60000.0	2.856	
71130.0	2.876	
84340.0	2.884	
-----