pwiDB

Plasma-Surface Interaction Data Set 518

Sputtering of Kr⁺ on Bi(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Bi(pc) at 300 K

angle = 0.0 deg	E /eV	P
	9.176	2.722e-35
	11.09	0.0002019
	13.41	0.001237
	16.21	0.00418
	19.6	0.01098
	23.69	0.02475
	28.64	0.04967
	34.63	0.08989
	41.86	0.1474
	50.61	0.2206
	61.18	0.3048
	73.96	0.3953
	89.41	0.4891
	108.1	0.5856
	130.7	0.6858
	158.0	0.7913
	191.0	0.9039
	230.9	1.025
	279.1	1.157
	337.4	1.301
	407.9	1.458
	493.1	1.63
	596.1	1.816
	720.7	2.02
	871.2	2.24
	1053.0	2.479
	1273.0	2.736
	1539.0	3.012
	1861.0	3.308
	2250.0	3.623
	2720.0	3.957
	3288.0	4.31
	3975.0	4.681
	4805.0	5.069
	5809.0	5.473
	7022.0	5.89
	8489.0	6.319
	10260.0	6.758
	12410.0	7.202
	15000.0	7.651
	18130.0	8.098
	21920.0	8.542
	26500.0	8.978
	32040.0	9.402
	38730.0	9.808
	46820.0	10.19
	56600.0	10.55
	68420.0	10.87
	82720.0	11.16

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0578
q = 30.2
mu = 2.056
epsilonL = 1.421e-06
Eth = 9.176

Fit range

E = 9.176 – 100000