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Plasma-Surface Interaction Data Set 516

Sputtering of Pb+ on Pb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Pb+ on Pb(pc) at 300 K

angle = 0.0 deg E /eV P
10.316.156e-38
12.445.226e-05
15.00.0003572
18.090.001303
21.820.003675
26.310.008971
31.730.01985
38.270.04057
46.160.077
55.670.1354
67.140.2199
80.970.3296
97.650.4587
117.80.6004
142.00.7495
171.30.9048
206.61.067
249.21.24
300.51.425
362.41.627
437.11.848
527.12.091
635.72.359
766.72.655
924.72.981
1115.03.341
1345.03.735
1622.04.168
1956.04.641
2359.05.157
2845.05.718
3432.06.325
4139.06.981
4992.07.687
6020.08.444
7260.09.251
8756.010.11
10560.011.02
12740.011.98
15360.012.98
18520.014.03
22340.015.11
26940.016.23
32500.017.38
39190.018.55
47270.019.74
57010.020.93
68750.022.12
82920.023.3

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 10.31 – 100000