{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pb", "surface_phase": "pc", "species": {"text": "Pb+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"10.31": {"P": 6.156e-38}, "12.44": {"P": 5.226e-05}, "15.0": {"P": 0.0003572}, "18.09": {"P": 0.001303}, "21.82": {"P": 0.003675}, "26.31": {"P": 0.008971}, "31.73": {"P": 0.01985}, "38.27": {"P": 0.04057}, "46.16": {"P": 0.077}, "55.67": {"P": 0.1354}, "67.14": {"P": 0.2199}, "80.97": {"P": 0.3296}, "97.65": {"P": 0.4587}, "117.8": {"P": 0.6004}, "142.0": {"P": 0.7495}, "171.3": {"P": 0.9048}, "206.6": {"P": 1.067}, "249.2": {"P": 1.24}, "300.5": {"P": 1.425}, "362.4": {"P": 1.627}, "437.1": {"P": 1.848}, "527.1": {"P": 2.091}, "635.7": {"P": 2.359}, "766.7": {"P": 2.655}, "924.7": {"P": 2.981}, "1115.0": {"P": 3.341}, "1345.0": {"P": 3.735}, "1622.0": {"P": 4.168}, "1956.0": {"P": 4.641}, "2359.0": {"P": 5.157}, "2845.0": {"P": 5.718}, "3432.0": {"P": 6.325}, "4139.0": {"P": 6.981}, "4992.0": {"P": 7.687}, "6020.0": {"P": 8.444}, "7260.0": {"P": 9.251}, "8756.0": {"P": 10.11}, "10560.0": {"P": 11.02}, "12740.0": {"P": 11.98}, "15360.0": {"P": 12.98}, "18520.0": {"P": 14.03}, "22340.0": {"P": 15.11}, "26940.0": {"P": 16.23}, "32500.0": {"P": 17.38}, "39190.0": {"P": 18.55}, "47270.0": {"P": 19.74}, "57010.0": {"P": 20.93}, "68750.0": {"P": 22.12}, "82920.0": {"P": 23.3}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1461, "q": 81.32, "mu": 2.195, "epsilonL": 3.938e-07, "Eth": 10.31}, "E_min": 10.31, "E_max": 100000}}]}