Return to search

Plasma-Surface Interaction Data Set 515

Sputtering of Xe+ on Pb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Pb(pc) at 300 K

angle = 0.0 deg E /eV P
10.820.0
13.040.0001845
15.710.001162
18.930.003996
22.80.01066
27.470.02449
33.10.05031
39.880.09374
48.050.1591
57.90.2467
69.760.3523
84.050.4695
101.30.5932
122.00.7213
147.00.8541
177.10.9934
213.41.142
257.11.301
309.81.475
373.21.664
449.71.872
541.82.099
652.82.349
786.62.621
947.72.919
1142.03.244
1376.03.597
1658.03.98
1997.04.393
2406.04.837
2899.05.314
3493.05.823
4209.06.365
5071.06.939
6109.07.544
7361.08.178
8869.08.842
10690.09.53
12870.010.24
15510.010.97
18690.011.72
22520.012.48
27130.013.24
32690.014.0
39390.014.76
47450.015.5
57170.016.23
68890.016.92
83000.017.58

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 10.82 – 100000