{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pb", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Xe+ on Pb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0637, "q": 52.36, "mu": 2.098, "epsilonL": 7.81e-07, "Eth": 10.82}, "E_min": 10.82, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
10.82	0.0	
13.04	0.0001845	
15.71	0.001162	
18.93	0.003996	
22.8	0.01066	
27.47	0.02449	
33.1	0.05031	
39.88	0.09374	
48.05	0.1591	
57.9	0.2467	
69.76	0.3523	
84.05	0.4695	
101.3	0.5932	
122.0	0.7213	
147.0	0.8541	
177.1	0.9934	
213.4	1.142	
257.1	1.301	
309.8	1.475	
373.2	1.664	
449.7	1.872	
541.8	2.099	
652.8	2.349	
786.6	2.621	
947.7	2.919	
1142.0	3.244	
1376.0	3.597	
1658.0	3.98	
1997.0	4.393	
2406.0	4.837	
2899.0	5.314	
3493.0	5.823	
4209.0	6.365	
5071.0	6.939	
6109.0	7.544	
7361.0	8.178	
8869.0	8.842	
10690.0	9.53	
12870.0	10.24	
15510.0	10.97	
18690.0	11.72	
22520.0	12.48	
27130.0	13.24	
32690.0	14.0	
39390.0	14.76	
47450.0	15.5	
57170.0	16.23	
68890.0	16.92	
83000.0	17.58	
-----