pwiDB

Plasma-Surface Interaction Data Set 514

Sputtering of Kr⁺ on Pb(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Pb(pc) at 300 K

angle = 0.0 deg	E /eV	P
	9.138	1.232e-34
	11.05	0.000269
	13.36	0.001601
	16.15	0.005312
	19.52	0.01374
	23.6	0.03059
	28.54	0.06071
	34.5	0.1089
	41.71	0.1773
	50.43	0.2641
	60.97	0.3641
	73.72	0.4718
	89.13	0.5838
	107.8	0.6993
	130.3	0.8195
	157.5	0.9461
	190.4	1.081
	230.2	1.227
	278.4	1.385
	336.5	1.557
	406.9	1.745
	491.9	1.951
	594.7	2.174
	719.1	2.417
	869.4	2.681
	1051.0	2.967
	1271.0	3.274
	1536.0	3.605
	1857.0	3.958
	2246.0	4.335
	2715.0	4.734
	3283.0	5.156
	3969.0	5.599
	4798.0	6.062
	5801.0	6.544
	7014.0	7.042
	8480.0	7.554
	10250.0	8.076
	12400.0	8.606
	14990.0	9.14
	18120.0	9.674
	21900.0	10.2
	26480.0	10.72
	32020.0	11.22
	38710.0	11.71
	46800.0	12.16
	56590.0	12.58
	68410.0	12.97
	82710.0	13.3

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0551
q = 35.96
mu = 2.021
epsilonL = 1.438e-06
Eth = 9.137

Fit range

E = 9.137 – 100000