{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pb", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"9.138": {"P": 1.232e-34}, "11.05": {"P": 0.000269}, "13.36": {"P": 0.001601}, "16.15": {"P": 0.005312}, "19.52": {"P": 0.01374}, "23.6": {"P": 0.03059}, "28.54": {"P": 0.06071}, "34.5": {"P": 0.1089}, "41.71": {"P": 0.1773}, "50.43": {"P": 0.2641}, "60.97": {"P": 0.3641}, "73.72": {"P": 0.4718}, "89.13": {"P": 0.5838}, "107.8": {"P": 0.6993}, "130.3": {"P": 0.8195}, "157.5": {"P": 0.9461}, "190.4": {"P": 1.081}, "230.2": {"P": 1.227}, "278.4": {"P": 1.385}, "336.5": {"P": 1.557}, "406.9": {"P": 1.745}, "491.9": {"P": 1.951}, "594.7": {"P": 2.174}, "719.1": {"P": 2.417}, "869.4": {"P": 2.681}, "1051.0": {"P": 2.967}, "1271.0": {"P": 3.274}, "1536.0": {"P": 3.605}, "1857.0": {"P": 3.958}, "2246.0": {"P": 4.335}, "2715.0": {"P": 4.734}, "3283.0": {"P": 5.156}, "3969.0": {"P": 5.599}, "4798.0": {"P": 6.062}, "5801.0": {"P": 6.544}, "7014.0": {"P": 7.042}, "8480.0": {"P": 7.554}, "10250.0": {"P": 8.076}, "12400.0": {"P": 8.606}, "14990.0": {"P": 9.14}, "18120.0": {"P": 9.674}, "21900.0": {"P": 10.2}, "26480.0": {"P": 10.72}, "32020.0": {"P": 11.22}, "38710.0": {"P": 11.71}, "46800.0": {"P": 12.16}, "56590.0": {"P": 12.58}, "68410.0": {"P": 12.97}, "82710.0": {"P": 13.3}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0551, "q": 35.96, "mu": 2.021, "epsilonL": 1.438e-06, "Eth": 9.137}, "E_min": 9.137, "E_max": 100000}}]}