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Plasma-Surface Interaction Data Set 513

Sputtering of Ar+ on Pb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Pb(pc) at 300 K

angle = 0.0 deg E /eV P
8.430.0
10.210.000386
12.360.002132
14.970.006703
18.130.0165
21.960.03485
26.590.06523
32.20.1098
38.990.1676
47.220.2353
57.190.3087
69.250.3848
83.860.4624
101.60.542
123.00.6246
148.90.7114
180.40.8037
218.40.9026
264.51.009
320.31.124
387.91.247
469.81.38
568.91.523
689.01.675
834.31.838
1010.02.011
1224.02.194
1482.02.387
1794.02.588
2173.02.798
2632.03.016
3187.03.24
3859.03.469
4674.03.702
5660.03.936
6854.04.172
8300.04.405
10050.04.634
12170.04.858
14740.05.072
17850.05.275
21620.05.464
26180.05.636
31700.05.788
38390.05.916
46500.06.018
56310.06.091
68190.06.132
82580.06.138

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 8.43 – 100000