{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pb", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Pb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0462, "q": 15.7, "mu": 1.927, "epsilonL": 3.642e-06, "Eth": 8.43}, "E_min": 8.43, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
8.43	0.0	
10.21	0.000386	
12.36	0.002132	
14.97	0.006703	
18.13	0.0165	
21.96	0.03485	
26.59	0.06523	
32.2	0.1098	
38.99	0.1676	
47.22	0.2353	
57.19	0.3087	
69.25	0.3848	
83.86	0.4624	
101.6	0.542	
123.0	0.6246	
148.9	0.7114	
180.4	0.8037	
218.4	0.9026	
264.5	1.009	
320.3	1.124	
387.9	1.247	
469.8	1.38	
568.9	1.523	
689.0	1.675	
834.3	1.838	
1010.0	2.011	
1224.0	2.194	
1482.0	2.387	
1794.0	2.588	
2173.0	2.798	
2632.0	3.016	
3187.0	3.24	
3859.0	3.469	
4674.0	3.702	
5660.0	3.936	
6854.0	4.172	
8300.0	4.405	
10050.0	4.634	
12170.0	4.858	
14740.0	5.072	
17850.0	5.275	
21620.0	5.464	
26180.0	5.636	
31700.0	5.788	
38390.0	5.916	
46500.0	6.018	
56310.0	6.091	
68190.0	6.132	
82580.0	6.138	
-----