Return to search

Plasma-Surface Interaction Data Set 512

Sputtering of Ne+ on Pb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne+ on Pb(pc) at 300 K

angle = 0.0 deg E /eV P
9.6890.0
11.70.0002112
14.130.001399
17.060.004923
20.60.01313
24.880.02923
30.040.05617
36.280.09443
43.810.141
52.90.1913
63.880.2416
77.150.2908
93.160.3392
112.50.3878
135.80.4376
164.00.4896
198.10.5445
239.20.6027
288.90.6646
348.80.7304
421.20.8003
508.70.8743
614.30.9523
741.81.034
895.71.12
1082.01.209
1306.01.301
1577.01.396
1905.01.493
2300.01.591
2777.01.691
3354.01.79
4050.01.889
4891.01.986
5906.02.08
7132.02.171
8613.02.257
10400.02.337
12560.02.411
15170.02.476
18310.02.531
22120.02.576
26710.02.609
32250.02.628
38940.02.633
47030.02.624
56790.02.598
68580.02.556
82810.02.499

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 9.689 – 100000