{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pb", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Pb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0569, "q": 6.734, "mu": 2.163, "epsilonL": 7.456e-06, "Eth": 9.689}, "E_min": 9.689, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
9.689	0.0	
11.7	0.0002112	
14.13	0.001399	
17.06	0.004923	
20.6	0.01313	
24.88	0.02923	
30.04	0.05617	
36.28	0.09443	
43.81	0.141	
52.9	0.1913	
63.88	0.2416	
77.15	0.2908	
93.16	0.3392	
112.5	0.3878	
135.8	0.4376	
164.0	0.4896	
198.1	0.5445	
239.2	0.6027	
288.9	0.6646	
348.8	0.7304	
421.2	0.8003	
508.7	0.8743	
614.3	0.9523	
741.8	1.034	
895.7	1.12	
1082.0	1.209	
1306.0	1.301	
1577.0	1.396	
1905.0	1.493	
2300.0	1.591	
2777.0	1.691	
3354.0	1.79	
4050.0	1.889	
4891.0	1.986	
5906.0	2.08	
7132.0	2.171	
8613.0	2.257	
10400.0	2.337	
12560.0	2.411	
15170.0	2.476	
18310.0	2.531	
22120.0	2.576	
26710.0	2.609	
32250.0	2.628	
38940.0	2.633	
47030.0	2.624	
56790.0	2.598	
68580.0	2.556	
82810.0	2.499	
-----