pwiDB

Plasma-Surface Interaction Data Set 508

Sputtering of Au⁺ on Au(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Au⁺ on Au(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.41	4.291e-30
	25.44	0.0002078
	30.23	0.0009434
	35.92	0.002618
	42.68	0.005936
	50.71	0.01203
	60.25	0.02261
	71.59	0.0402
	85.06	0.06817
	101.1	0.1106
	120.1	0.1719
	142.7	0.2557
	169.5	0.3638
	201.4	0.4956
	239.4	0.6484
	284.4	0.8183
	337.9	1.002
	401.5	1.197
	477.1	1.402
	566.8	1.618
	673.5	1.846
	800.3	2.088
	950.9	2.347
	1130.0	2.624
	1342.0	2.921
	1595.0	3.241
	1895.0	3.586
	2252.0	3.956
	2676.0	4.355
	3179.0	4.782
	3777.0	5.24
	4488.0	5.729
	5333.0	6.25
	6336.0	6.803
	7529.0	7.388
	8946.0	8.006
	10630.0	8.654
	12630.0	9.333
	15010.0	10.04
	17830.0	10.78
	21190.0	11.53
	25170.0	12.31
	29910.0	13.11
	35540.0	13.92
	42230.0	14.75
	50170.0	15.57
	59610.0	16.4
	70830.0	17.22
	84160.0	18.02

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1126
q = 61.26
mu = 1.716
epsilonL = 4.296e-07
Eth = 21.41

Fit range

E = 21.41 – 100000