{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "Au+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Au+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1126, "q": 61.26, "mu": 1.716, "epsilonL": 4.296e-07, "Eth": 21.41}, "E_min": 21.41, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.41	4.291e-30	
25.44	0.0002078	
30.23	0.0009434	
35.92	0.002618	
42.68	0.005936	
50.71	0.01203	
60.25	0.02261	
71.59	0.0402	
85.06	0.06817	
101.1	0.1106	
120.1	0.1719	
142.7	0.2557	
169.5	0.3638	
201.4	0.4956	
239.4	0.6484	
284.4	0.8183	
337.9	1.002	
401.5	1.197	
477.1	1.402	
566.8	1.618	
673.5	1.846	
800.3	2.088	
950.9	2.347	
1130.0	2.624	
1342.0	2.921	
1595.0	3.241	
1895.0	3.586	
2252.0	3.956	
2676.0	4.355	
3179.0	4.782	
3777.0	5.24	
4488.0	5.729	
5333.0	6.25	
6336.0	6.803	
7529.0	7.388	
8946.0	8.006	
10630.0	8.654	
12630.0	9.333	
15010.0	10.04	
17830.0	10.78	
21190.0	11.53	
25170.0	12.31	
29910.0	13.11	
35540.0	13.92	
42230.0	14.75	
50170.0	15.57	
59610.0	16.4	
70830.0	17.22	
84160.0	18.02	
-----