pwiDB

Plasma-Surface Interaction Data Set 507

Sputtering of Xe⁺ on Au(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Au(pc) at 300 K

angle = 0.0 deg	E /eV	P
	19.76	2.048e-42
	23.52	6.273e-05
	27.99	0.0005312
	33.31	0.002194
	39.64	0.006741
	47.18	0.01749
	56.15	0.04024
	66.83	0.08355
	79.54	0.1568
	94.66	0.2648
	112.7	0.4032
	134.1	0.5596
	159.6	0.7216
	189.9	0.8824
	226.0	1.042
	269.0	1.202
	320.1	1.368
	381.0	1.542
	453.4	1.727
	539.7	1.927
	642.3	2.142
	764.4	2.375
	909.7	2.628
	1083.0	2.902
	1289.0	3.197
	1534.0	3.516
	1825.0	3.859
	2172.0	4.226
	2585.0	4.618
	3077.0	5.037
	3662.0	5.481
	4358.0	5.95
	5186.0	6.445
	6173.0	6.965
	7346.0	7.508
	8743.0	8.073
	10410.0	8.659
	12380.0	9.262
	14740.0	9.882
	17540.0	10.51
	20880.0	11.16
	24840.0	11.8
	29570.0	12.45
	35190.0	13.1
	41880.0	13.73
	49840.0	14.36
	59320.0	14.97
	70600.0	15.55
	84020.0	16.1

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1371
q = 47.61
mu = 2.505
epsilonL = 8.003e-07
Eth = 19.76

Fit range

E = 19.76 – 100000