{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1371, "q": 47.61, "mu": 2.505, "epsilonL": 8.003e-07, "Eth": 19.76}, "E_min": 19.76, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
19.76	2.048e-42	
23.52	6.273e-05	
27.99	0.0005312	
33.31	0.002194	
39.64	0.006741	
47.18	0.01749	
56.15	0.04024	
66.83	0.08355	
79.54	0.1568	
94.66	0.2648	
112.7	0.4032	
134.1	0.5596	
159.6	0.7216	
189.9	0.8824	
226.0	1.042	
269.0	1.202	
320.1	1.368	
381.0	1.542	
453.4	1.727	
539.7	1.927	
642.3	2.142	
764.4	2.375	
909.7	2.628	
1083.0	2.902	
1289.0	3.197	
1534.0	3.516	
1825.0	3.859	
2172.0	4.226	
2585.0	4.618	
3077.0	5.037	
3662.0	5.481	
4358.0	5.95	
5186.0	6.445	
6173.0	6.965	
7346.0	7.508	
8743.0	8.073	
10410.0	8.659	
12380.0	9.262	
14740.0	9.882	
17540.0	10.51	
20880.0	11.16	
24840.0	11.8	
29570.0	12.45	
35190.0	13.1	
41880.0	13.73	
49840.0	14.36	
59320.0	14.97	
70600.0	15.55	
84020.0	16.1	
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