pwiDB

Plasma-Surface Interaction Data Set 506

Sputtering of Kr⁺ on Au(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Au(pc) at 300 K

angle = 0.0 deg	E /eV	P
	18.8	0.0
	22.39	0.0003503
	26.68	0.001666
	31.78	0.004758
	37.86	0.011
	45.11	0.02251
	53.74	0.0424
	64.02	0.07465
	76.27	0.1237
	90.87	0.1935
	108.3	0.2858
	129.0	0.3995
	153.6	0.5309
	183.0	0.675
	218.1	0.8276
	259.8	0.9861
	309.5	1.149
	368.7	1.318
	439.3	1.493
	523.4	1.677
	623.5	1.87
	742.8	2.075
	885.0	2.292
	1054.0	2.523
	1256.0	2.768
	1496.0	3.028
	1783.0	3.305
	2124.0	3.597
	2530.0	3.905
	3014.0	4.229
	3591.0	4.568
	4278.0	4.922
	5097.0	5.289
	6072.0	5.669
	7234.0	6.059
	8619.0	6.459
	10270.0	6.866
	12230.0	7.278
	14570.0	7.692
	17360.0	8.106
	20680.0	8.517
	24640.0	8.92
	29360.0	9.314
	34980.0	9.695
	41670.0	10.06
	49640.0	10.4
	59140.0	10.71
	70460.0	11.0
	83940.0	11.25

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.094
q = 30.24
mu = 1.771
epsilonL = 1.482e-06
Eth = 18.8

Fit range

E = 18.8 – 100000