{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.094, "q": 30.24, "mu": 1.771, "epsilonL": 1.482e-06, "Eth": 18.8}, "E_min": 18.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.8	0.0	
22.39	0.0003503	
26.68	0.001666	
31.78	0.004758	
37.86	0.011	
45.11	0.02251	
53.74	0.0424	
64.02	0.07465	
76.27	0.1237	
90.87	0.1935	
108.3	0.2858	
129.0	0.3995	
153.6	0.5309	
183.0	0.675	
218.1	0.8276	
259.8	0.9861	
309.5	1.149	
368.7	1.318	
439.3	1.493	
523.4	1.677	
623.5	1.87	
742.8	2.075	
885.0	2.292	
1054.0	2.523	
1256.0	2.768	
1496.0	3.028	
1783.0	3.305	
2124.0	3.597	
2530.0	3.905	
3014.0	4.229	
3591.0	4.568	
4278.0	4.922	
5097.0	5.289	
6072.0	5.669	
7234.0	6.059	
8619.0	6.459	
10270.0	6.866	
12230.0	7.278	
14570.0	7.692	
17360.0	8.106	
20680.0	8.517	
24640.0	8.92	
29360.0	9.314	
34980.0	9.695	
41670.0	10.06	
49640.0	10.4	
59140.0	10.71	
70460.0	11.0	
83940.0	11.25	
-----