pwiDB

Plasma-Surface Interaction Data Set 502

Sputtering of N⁺ on Au(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Au(pc) at 300 K

angle = 0.0 deg	E /eV	P
	22.08	1.109e-34
	26.22	0.0002434
	31.14	0.001401
	36.98	0.004471
	43.91	0.01108
	52.14	0.02348
	61.91	0.04414
	73.51	0.0746
	87.29	0.1143
	103.7	0.1603
	123.1	0.2087
	146.2	0.2566
	173.5	0.3025
	206.1	0.3464
	244.7	0.3887
	290.6	0.4302
	345.0	0.4717
	409.7	0.5135
	486.5	0.556
	577.7	0.5995
	686.0	0.644
	814.5	0.6896
	967.2	0.7361
	1148.0	0.7835
	1364.0	0.8315
	1619.0	0.88
	1923.0	0.9286
	2283.0	0.977
	2711.0	1.025
	3220.0	1.072
	3823.0	1.118
	4540.0	1.162
	5390.0	1.204
	6401.0	1.244
	7601.0	1.281
	9025.0	1.314
	10720.0	1.343
	12730.0	1.367
	15110.0	1.387
	17940.0	1.401
	21310.0	1.409
	25300.0	1.41
	30040.0	1.405
	35670.0	1.393
	42360.0	1.374
	50300.0	1.347
	59730.0	1.314
	70920.0	1.274
	84220.0	1.228

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0934
q = 3.607
mu = 2.028
epsilonL = 1.169e-05
Eth = 22.08

Fit range

E = 22.08 – 100000