{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of N+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0934, "q": 3.607, "mu": 2.028, "epsilonL": 1.169e-05, "Eth": 22.08}, "E_min": 22.08, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
22.08	1.109e-34	
26.22	0.0002434	
31.14	0.001401	
36.98	0.004471	
43.91	0.01108	
52.14	0.02348	
61.91	0.04414	
73.51	0.0746	
87.29	0.1143	
103.7	0.1603	
123.1	0.2087	
146.2	0.2566	
173.5	0.3025	
206.1	0.3464	
244.7	0.3887	
290.6	0.4302	
345.0	0.4717	
409.7	0.5135	
486.5	0.556	
577.7	0.5995	
686.0	0.644	
814.5	0.6896	
967.2	0.7361	
1148.0	0.7835	
1364.0	0.8315	
1619.0	0.88	
1923.0	0.9286	
2283.0	0.977	
2711.0	1.025	
3220.0	1.072	
3823.0	1.118	
4540.0	1.162	
5390.0	1.204	
6401.0	1.244	
7601.0	1.281	
9025.0	1.314	
10720.0	1.343	
12730.0	1.367	
15110.0	1.387	
17940.0	1.401	
21310.0	1.409	
25300.0	1.41	
30040.0	1.405	
35670.0	1.393	
42360.0	1.374	
50300.0	1.347	
59730.0	1.314	
70920.0	1.274	
84220.0	1.228	
-----