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Plasma-Surface Interaction Data Set 501

Sputtering of ⁴He⁺ on Au(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ⁴He⁺ on Au(pc) at 300 K

angle = 0.0 deg	E /eV	P
	57.27	0.0
	66.7	0.0003258
	77.67	0.001352
	90.46	0.003403
	105.3	0.006854
	122.7	0.01199
	142.9	0.01883
	166.4	0.02706
	193.8	0.03608
	225.6	0.04521
	262.8	0.05395
	306.0	0.062
	356.4	0.0693
	415.0	0.07588
	483.3	0.08184
	562.9	0.08731
	655.5	0.09237
	763.4	0.0971
	889.0	0.1015
	1035.0	0.1057
	1206.0	0.1097
	1404.0	0.1134
	1635.0	0.1169
	1904.0	0.1201
	2218.0	0.123
	2583.0	0.1256
	3008.0	0.1279
	3503.0	0.1298
	4079.0	0.1313
	4750.0	0.1324
	5532.0	0.133
	6442.0	0.1332
	7503.0	0.1328
	8737.0	0.132
	10180.0	0.1306
	11850.0	0.1287
	13800.0	0.1262
	16070.0	0.1233
	18720.0	0.1199
	21800.0	0.116
	25380.0	0.1118
	29560.0	0.1072
	34420.0	0.1023
	40090.0	0.09721
	46690.0	0.09195
	54370.0	0.0866
	63320.0	0.08122
	73730.0	0.07586
	85870.0	0.07059

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0928
q = 0.3406
mu = 1.677
epsilonL = 4.513e-05
Eth = 57.27

Fit range

E = 57.27 – 100000