{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0928, "q": 0.3406, "mu": 1.677, "epsilonL": 4.513e-05, "Eth": 57.27}, "E_min": 57.27, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
57.27	0.0	
66.7	0.0003258	
77.67	0.001352	
90.46	0.003403	
105.3	0.006854	
122.7	0.01199	
142.9	0.01883	
166.4	0.02706	
193.8	0.03608	
225.6	0.04521	
262.8	0.05395	
306.0	0.062	
356.4	0.0693	
415.0	0.07588	
483.3	0.08184	
562.9	0.08731	
655.5	0.09237	
763.4	0.0971	
889.0	0.1015	
1035.0	0.1057	
1206.0	0.1097	
1404.0	0.1134	
1635.0	0.1169	
1904.0	0.1201	
2218.0	0.123	
2583.0	0.1256	
3008.0	0.1279	
3503.0	0.1298	
4079.0	0.1313	
4750.0	0.1324	
5532.0	0.133	
6442.0	0.1332	
7503.0	0.1328	
8737.0	0.132	
10180.0	0.1306	
11850.0	0.1287	
13800.0	0.1262	
16070.0	0.1233	
18720.0	0.1199	
21800.0	0.116	
25380.0	0.1118	
29560.0	0.1072	
34420.0	0.1023	
40090.0	0.09721	
46690.0	0.09195	
54370.0	0.0866	
63320.0	0.08122	
73730.0	0.07586	
85870.0	0.07059	
-----