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Plasma-Surface Interaction Data Set 500

Sputtering of ³He⁺ on Au(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ³He⁺ on Au(pc) at 300 K

angle = 0.0 deg	E /eV	P
	75.17	0.0
	87.05	0.0003491
	100.8	0.001361
	116.8	0.003303
	135.2	0.006525
	156.6	0.01135
	181.4	0.01798
	210.0	0.02632
	243.3	0.036
	281.7	0.04641
	326.3	0.05688
	377.9	0.06692
	437.6	0.07619
	506.8	0.08458
	586.9	0.09212
	679.7	0.09888
	787.2	0.105
	911.7	0.1105
	1056.0	0.1156
	1223.0	0.1203
	1416.0	0.1245
	1640.0	0.1285
	1899.0	0.1321
	2200.0	0.1353
	2548.0	0.1382
	2950.0	0.1407
	3417.0	0.1428
	3957.0	0.1446
	4583.0	0.1458
	5308.0	0.1466
	6147.0	0.147
	7119.0	0.1468
	8245.0	0.146
	9548.0	0.1448
	11060.0	0.143
	12810.0	0.1406
	14830.0	0.1378
	17180.0	0.1344
	19890.0	0.1305
	23040.0	0.1262
	26680.0	0.1216
	30900.0	0.1166
	35790.0	0.1113
	41450.0	0.1058
	48000.0	0.1002
	55590.0	0.09452
	64380.0	0.0888
	74560.0	0.08311
	86350.0	0.07751

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1346
q = 0.3759
mu = 1.603
epsilonL = 4.535e-05
Eth = 75.17

Fit range

E = 75.17 – 100000