{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1346, "q": 0.3759, "mu": 1.603, "epsilonL": 4.535e-05, "Eth": 75.17}, "E_min": 75.17, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
75.17	0.0	
87.05	0.0003491	
100.8	0.001361	
116.8	0.003303	
135.2	0.006525	
156.6	0.01135	
181.4	0.01798	
210.0	0.02632	
243.3	0.036	
281.7	0.04641	
326.3	0.05688	
377.9	0.06692	
437.6	0.07619	
506.8	0.08458	
586.9	0.09212	
679.7	0.09888	
787.2	0.105	
911.7	0.1105	
1056.0	0.1156	
1223.0	0.1203	
1416.0	0.1245	
1640.0	0.1285	
1899.0	0.1321	
2200.0	0.1353	
2548.0	0.1382	
2950.0	0.1407	
3417.0	0.1428	
3957.0	0.1446	
4583.0	0.1458	
5308.0	0.1466	
6147.0	0.147	
7119.0	0.1468	
8245.0	0.146	
9548.0	0.1448	
11060.0	0.143	
12810.0	0.1406	
14830.0	0.1378	
17180.0	0.1344	
19890.0	0.1305	
23040.0	0.1262	
26680.0	0.1216	
30900.0	0.1166	
35790.0	0.1113	
41450.0	0.1058	
48000.0	0.1002	
55590.0	0.09452	
64380.0	0.0888	
74560.0	0.08311	
86350.0	0.07751	
-----