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Plasma-Surface Interaction Data Set 498

Sputtering of D+ on Au(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Au(pc) at 300 K

angle = 0.0 deg E /eV P
113.00.0
129.70.0002574
149.00.0007612
171.10.001542
196.60.002652
225.80.004126
259.30.005973
297.80.008157
342.00.0106
392.80.01319
451.20.01579
518.20.01832
595.20.02066
683.60.02279
785.10.02467
901.70.02631
1036.00.02772
1190.00.02892
1366.00.02992
1569.00.03075
1802.00.03142
2070.00.03194
2377.00.03233
2730.00.03258
3136.00.0327
3602.00.0327
4137.00.03258
4751.00.03233
5457.00.03197
6268.00.03149
7199.00.0309
8268.00.03021
9496.00.02941
10910.00.02853
12530.00.02757
14390.00.02654
16520.00.02544
18980.00.02431
21800.00.02313
25040.00.02193
28750.00.02072
33020.00.01952
37930.00.01832
43560.00.01714
50040.00.01598
57470.00.01486
66000.00.01379
75810.00.01275
87070.00.01177

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 113 – 100000