{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2082, "q": 0.0843, "mu": 1.274, "epsilonL": 9.253e-05, "Eth": 113}, "E_min": 113, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
113.0	0.0	
129.7	0.0002574	
149.0	0.0007612	
171.1	0.001542	
196.6	0.002652	
225.8	0.004126	
259.3	0.005973	
297.8	0.008157	
342.0	0.0106	
392.8	0.01319	
451.2	0.01579	
518.2	0.01832	
595.2	0.02066	
683.6	0.02279	
785.1	0.02467	
901.7	0.02631	
1036.0	0.02772	
1190.0	0.02892	
1366.0	0.02992	
1569.0	0.03075	
1802.0	0.03142	
2070.0	0.03194	
2377.0	0.03233	
2730.0	0.03258	
3136.0	0.0327	
3602.0	0.0327	
4137.0	0.03258	
4751.0	0.03233	
5457.0	0.03197	
6268.0	0.03149	
7199.0	0.0309	
8268.0	0.03021	
9496.0	0.02941	
10910.0	0.02853	
12530.0	0.02757	
14390.0	0.02654	
16520.0	0.02544	
18980.0	0.02431	
21800.0	0.02313	
25040.0	0.02193	
28750.0	0.02072	
33020.0	0.01952	
37930.0	0.01832	
43560.0	0.01714	
50040.0	0.01598	
57470.0	0.01486	
66000.0	0.01379	
75810.0	0.01275	
87070.0	0.01177	
-----