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Plasma-Surface Interaction Data Set 497

Sputtering of H+ on Au(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Au(pc) at 300 K

angle = 0.0 deg E /eV P
206.40.0
234.22.999e-05
265.70.0001353
301.40.0003552
341.90.0007369
387.90.001323
440.10.002134
499.30.003144
566.40.004284
642.60.005453
729.00.006559
827.10.007538
938.30.008364
1064.00.009039
1208.00.009579
1370.00.01001
1554.00.01034
1763.00.0106
2001.00.0108
2270.00.01095
2575.00.01104
2921.00.0111
3314.00.01112
3760.00.0111
4265.00.01105
4839.00.01097
5490.00.01085
6228.00.01069
7066.00.01051
8016.00.0103
9094.00.01006
10320.00.009796
11710.00.009508
13280.00.009198
15070.00.00887
17090.00.008527
19390.00.008172
22000.00.007807
24960.00.007436
28310.00.007063
32120.00.006688
36440.00.006317
41340.00.00595
46900.00.00559
53210.00.005239
60370.00.004898
68480.00.004569
77700.00.004253
88150.00.003951

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 206.4 – 100000