{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of H+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3117, "q": 0.0286, "mu": 1.841, "epsilonL": 9.3e-05, "Eth": 206.4}, "E_min": 206.4, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
206.4	0.0	
234.2	2.999e-05	
265.7	0.0001353	
301.4	0.0003552	
341.9	0.0007369	
387.9	0.001323	
440.1	0.002134	
499.3	0.003144	
566.4	0.004284	
642.6	0.005453	
729.0	0.006559	
827.1	0.007538	
938.3	0.008364	
1064.0	0.009039	
1208.0	0.009579	
1370.0	0.01001	
1554.0	0.01034	
1763.0	0.0106	
2001.0	0.0108	
2270.0	0.01095	
2575.0	0.01104	
2921.0	0.0111	
3314.0	0.01112	
3760.0	0.0111	
4265.0	0.01105	
4839.0	0.01097	
5490.0	0.01085	
6228.0	0.01069	
7066.0	0.01051	
8016.0	0.0103	
9094.0	0.01006	
10320.0	0.009796	
11710.0	0.009508	
13280.0	0.009198	
15070.0	0.00887	
17090.0	0.008527	
19390.0	0.008172	
22000.0	0.007807	
24960.0	0.007436	
28310.0	0.007063	
32120.0	0.006688	
36440.0	0.006317	
41340.0	0.00595	
46900.0	0.00559	
53210.0	0.005239	
60370.0	0.004898	
68480.0	0.004569	
77700.0	0.004253	
88150.0	0.003951	
-----