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Plasma-Surface Interaction Data Set 496

Sputtering of Pt+ on Pt(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Pt+ on Pt(pc) at 300 K

angle = 0.0 deg E /eV P
28.040.0
33.142.156e-05
39.160.0001747
46.270.0006986
54.670.002095
64.610.005356
76.340.01233
90.210.0262
106.60.05188
126.00.09566
148.80.1634
175.90.2573
207.80.3734
245.60.5033
290.20.6388
342.90.7749
405.20.9108
478.81.048
565.81.189
668.61.337
790.11.493
933.61.66
1103.01.84
1304.02.034
1540.02.243
1820.02.469
2151.02.712
2542.02.974
3004.03.254
3549.03.555
4194.03.875
4956.04.217
5856.04.58
6920.04.963
8177.05.368
9662.05.793
11420.06.237
13490.06.701
15940.07.183
18840.07.682
22260.08.195
26310.08.721
31080.09.257
36730.09.802
43400.010.35
51290.010.9
60610.011.45
71620.012.0
84630.012.53

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 28.04 – 100000