{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "Pt+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Pt+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2616, "q": 42.22, "mu": 2.469, "epsilonL": 4.425e-07, "Eth": 28.04}, "E_min": 28.04, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.04	0.0	
33.14	2.156e-05	
39.16	0.0001747	
46.27	0.0006986	
54.67	0.002095	
64.61	0.005356	
76.34	0.01233	
90.21	0.0262	
106.6	0.05188	
126.0	0.09566	
148.8	0.1634	
175.9	0.2573	
207.8	0.3734	
245.6	0.5033	
290.2	0.6388	
342.9	0.7749	
405.2	0.9108	
478.8	1.048	
565.8	1.189	
668.6	1.337	
790.1	1.493	
933.6	1.66	
1103.0	1.84	
1304.0	2.034	
1540.0	2.243	
1820.0	2.469	
2151.0	2.712	
2542.0	2.974	
3004.0	3.254	
3549.0	3.555	
4194.0	3.875	
4956.0	4.217	
5856.0	4.58	
6920.0	4.963	
8177.0	5.368	
9662.0	5.793	
11420.0	6.237	
13490.0	6.701	
15940.0	7.183	
18840.0	7.682	
22260.0	8.195	
26310.0	8.721	
31080.0	9.257	
36730.0	9.802	
43400.0	10.35	
51290.0	10.9	
60610.0	11.45	
71620.0	12.0	
84630.0	12.53	
-----