pwiDB

Plasma-Surface Interaction Data Set 495

Sputtering of Xe⁺ on Pt(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Pt(pc) at 300 K

angle = 0.0 deg	E /eV	P
	34.1	2.704e-26
	40.13	0.0009265
	47.23	0.003498
	55.59	0.008545
	65.43	0.01742
	77.01	0.03206
	90.64	0.05501
	106.7	0.08949
	125.6	0.1391
	147.8	0.2074
	173.9	0.2971
	204.7	0.4098
	240.9	0.545
	283.5	0.7007
	333.7	0.8738
	392.8	1.061
	462.3	1.26
	544.1	1.468
	640.4	1.686
	753.7	1.913
	887.0	2.15
	1044.0	2.398
	1229.0	2.658
	1446.0	2.932
	1702.0	3.221
	2003.0	3.527
	2358.0	3.849
	2775.0	4.189
	3266.0	4.547
	3844.0	4.924
	4524.0	5.319
	5325.0	5.733
	6267.0	6.165
	7376.0	6.614
	8681.0	7.08
	10220.0	7.561
	12030.0	8.056
	14150.0	8.562
	16660.0	9.079
	19610.0	9.604
	23080.0	10.13
	27160.0	10.67
	31970.0	11.2
	37620.0	11.72
	44280.0	12.24
	52110.0	12.75
	61340.0	13.24
	72190.0	13.72
	84960.0	14.16

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0658
q = 41.71
mu = 1.508
epsilonL = 8.094e-07
Eth = 34.1

Fit range

E = 34.1 – 100000